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Etching and Characterization of Microelectronic Films and Integrated Circuits

dc.contributor.authorLangendorf, Matthew, L. ( )
dc.date.accessioned2020-06-15T16:03:49Z
dc.date.available2020-06-15T16:03:49Z
dc.date.issued2001-05
dc.identifier.citationLangendorf, M. L. (2001). Etching and characterization of microelectronic films and integrated circuits (Unpublished thesis). Southwest Texas State University, San Marcos, Texas.
dc.identifier.urihttps://digital.library.txstate.edu/handle/10877/11646
dc.description.abstractNo abstract prepared.
dc.formatText
dc.format.extent171 pages
dc.format.medium1 file (.pdf)
dc.language.isoen_US
dc.subjectMicroelectronics
dc.subjectIntegrated circuits
dc.subjectThin films
dc.titleEtching and Characterization of Microelectronic Films and Integrated Circuits
txstate.documenttypeThesis
thesis.degree.departmentPhysics
thesis.degree.grantorSouthwest Texas State University
thesis.degree.levelMasters
thesis.degree.nameMaster of Science
txstate.accessrestricted
txstate.departmentPhysics


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