Etching and Characterization of Microelectronic Films and Integrated Circuits
Date
2001-05
Authors
Langendorf, Matthew, L.
Journal Title
Journal ISSN
Volume Title
Publisher
Abstract
No abstract prepared.
Description
Keywords
microelectronics, integrated circuits, thin films
Citation
Langendorf, M. L. (2001). Etching and characterization of microelectronic films and integrated circuits (Unpublished thesis). Southwest Texas State University, San Marcos, Texas.