Investigation of thin film cobalt silicide formation on thermal oxide barrier layers
Date
2004-08
Authors
Larison, Dana L.
Journal Title
Journal ISSN
Volume Title
Publisher
Abstract
No abstract prepared.
Description
Keywords
thin films, silicides, cobalt
Citation
Larison, D. L. (2004). Investigation of thin film cobalt silicide formation on thermal oxide barrier layers (Unpublished thesis). Texas State University-San Marcos, San Marcos, Texas.
Larison, D. L. (2004). Investigation of thin film cobalt silicide formation on thermal oxide barrier layers (Unpublished thesis). Texas State University-San Marcos, San Marcos, Texas.
Larison, D. L. (2004). Investigation of thin film cobalt silicide formation on thermal oxide barrier layers (Unpublished thesis). Texas State University-San Marcos, San Marcos, Texas.