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dc.contributor.authorMonreal, Gabriel H.en_US
dc.contributor.authorStaggs, Sara J.en_US
dc.contributor.authorBlanda, Michael T.en_US
dc.contributor.authorGeerts, Wilhelmus J.en_US
dc.contributor.authorGalloway, Heatheren_US
dc.contributor.authorSpencer, Gregory F.en_US
dc.date.accessioned2010-10-13T10:21:02Z
dc.date.available2012-02-24T10:21:04Z
dc.date.issued2005-09-14en_US
dc.identifier.urihttps://digital.library.txstate.edu/handle/10877/4050
dc.descriptionCopyright (2005) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.en_US
dc.description.abstractCalixarenes of a variety of molecular weights and with several different functional attachments have been studied as high resolution, high contrast negative electron beam resists. In this article, results are presented for a new type of calixarene molecule to be used as an electron beam resist. The molecule differs from previous calixarene resists through the use of bridging groups to limit its conformational mobility and by having only a partial functionalization of the available phenol units with allyl groups to enhance the resist sensitivity. Both the sensitivity and contrast of the calixarene were measured. The measured contrast was found to be 4, while the sensitivity was 3.6?mC/cm2 which is comparable to other fully functionalized calix[6]arene resists. A closer comparison of this calixarene with similar calixarenes indicates that the measured sensitivity is better than would be expected for this partially functionalized molecule and that full functionalization might not be necessary to obtain a significant benefit from the functional groups.en_US
dc.formatText
dc.format.extent5 pages
dc.format.medium1 file (.pdf)
dc.language.isoen_US
dc.publisherAmerican Institute of Physics
dc.sourceJournal of Vacuum. Science and Technology, B, (Sep/Oct 2005), Melville, NY: American Institute of Physics. Vol. 23, Issue 5, pp. 1998-2002.
dc.subjectSynthesisen_US
dc.subjectCharacterizationen_US
dc.subjectInvestigationen_US
dc.subjectCalixarenesen_US
dc.subjectMolecular weighten_US
dc.subjectElectron beam resistsen_US
dc.subject.classificationChemistryen_US
dc.subject.classificationPhysicsen_US
dc.titleSynthesis, Characterization, and Investigation of a Conformationally Immobile Calix[6]arene as a Negative Electron Beam Resisten_US
txstate.documenttypeArticle
dc.identifier.doihttp://doi.org/10.1116/1.2038027
txstate.departmentPhysics


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