Design and Fabrication of Electrostatically Actuated and Inkjet Printed Micro-Electro-Mechanical-System (MEMS) Switch
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This thesis report presents the design and fabrication process of electrostatically actuated and inkjet printed MEMS switch. It introduces a novel design and fabrication process where it combines two different technologies - MEMS technology and inkjet printing technology. It should also to be noted that, for the first-time inkjet printing technology is introduced for the fabrication of a MEMS device. The physical structure of the switching system consists of an anchor, the cantilever beam, top electrode and bottom transmission lines. During the fabrication process, different printed layers are characterized with respect to terminal resistances, sheet resistances of the materials, critical thickness of each layer, conductivity etc. Finally, after DC analysis of the fully printed switch, 1.2V is found to be the minimum achievable pull-down voltage for the electrically actuated cantilever beam. The air gap between the top and bottom electrodes were in micron-scale during DC analysis. At the end of the thesis, the experimental data are compared with the theoretical data. It is found that, the experimental data is closely correlated with the theoretical assumption.