Advanced X-ray Characterization of ULSI materials

Date

2000-12

Authors

Ayala, Anival

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Abstract

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Keywords

integrated circuits, semiconductors, integrated circuits, x-rays, x-rays, thin-film circuits, semiconductor films, ultra large scale integration, design and construction

Citation

Ayala, A. (2000). Advanced X-ray characterization of ULSI materials (Unpublished thesis). Southwest Texas State University, San Marcos, Texas.

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