Advanced X-ray Characterization of ULSI materials
Date
2000-12
Authors
Ayala, Anival
Journal Title
Journal ISSN
Volume Title
Publisher
Abstract
No abstract prepared.
Description
Keywords
integrated circuits, semiconductors, integrated circuits, x-rays, x-rays, thin-film circuits, semiconductor films, ultra large scale integration, design and construction
Citation
Ayala, A. (2000). Advanced X-ray characterization of ULSI materials (Unpublished thesis). Southwest Texas State University, San Marcos, Texas.