Optical Properties of Athermally and Thermally Annealed Hafnium Oxide Thin Films on Silicon
Date
2003-12
Authors
Cain, Heather M.
Journal Title
Journal ISSN
Volume Title
Publisher
Abstract
No abstract prepared.
Description
Keywords
thin films, hafnium oxide, silicon, optical properties
Citation
Cain, H. M. (2003). Optical properties of athermally and thermally annealed hafnium oxide thin films on silicon (Unpublished thesis). Texas State University-San Marcos, San Marcos, Texas.