Modeling Chemical Mechanical Planarization of Copper with an Atomic Force Microscope
Date
2002-08
Authors
Fishbeck, Kelly
Journal Title
Journal ISSN
Volume Title
Publisher
Abstract
No abstract prepared.
Description
Keywords
Copper, Integrated circuits, Atomic force microscopy
Citation
Fishbeck, K. (2002). <i>Modeling chemical mechanical planarization of copper with an atomic force microscope</i> (Unpublished thesis). Southwest Texas State University, San Marcos, Texas.