Modeling Chemical Mechanical Planarization of Copper with an Atomic Force Microscope

Date

2002-08

Authors

Fishbeck, Kelly

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Abstract

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Keywords

Copper, Integrated circuits, Atomic force microscopy

Citation

Fishbeck, K. (2002). <i>Modeling chemical mechanical planarization of copper with an atomic force microscope</i> (Unpublished thesis). Southwest Texas State University, San Marcos, Texas.

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