Etching and Characterization of Microelectronic Films and Integrated Circuits

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dc.contributor.authorLangendorf, Matthew, L.
dc.date.accessioned2020-06-15T16:03:49Z
dc.date.available2020-06-15T16:03:49Z
dc.date.issued2001-05
dc.description.abstractNo abstract prepared.
dc.description.departmentPhysics
dc.formatText
dc.format.extent171 pages
dc.format.medium1 file (.pdf)
dc.identifier.citationLangendorf, M. L. (2001). Etching and characterization of microelectronic films and integrated circuits (Unpublished thesis). Southwest Texas State University, San Marcos, Texas.
dc.identifier.urihttps://hdl.handle.net/10877/11646
dc.language.isoen
dc.subjectmicroelectronics
dc.subjectintegrated circuits
dc.subjectthin films
dc.titleEtching and Characterization of Microelectronic Films and Integrated Circuits
dc.typeThesis
thesis.degree.departmentPhysics
thesis.degree.grantorSouthwest Texas State University
thesis.degree.levelMasters
thesis.degree.nameMaster of Science

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