Advanced X-ray Characterization of ULSI materials

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dc.contributor.authorAyala, Anival
dc.date.accessioned2019-11-26T13:30:12Z
dc.date.available2019-11-26T13:30:12Z
dc.date.issued2000-12
dc.description.abstractNo abstract prepared.
dc.description.departmentPhysics
dc.formatText
dc.format.extent92 pages
dc.format.medium1 file (.pdf)
dc.identifier.citationAyala, A. (2000). Advanced X-ray characterization of ULSI materials (Unpublished thesis). Southwest Texas State University, San Marcos, Texas.
dc.identifier.urihttps://hdl.handle.net/10877/8918
dc.language.isoen
dc.subjectintegrated circuits
dc.subjectsemiconductors
dc.subjectintegrated circuits
dc.subjectx-rays
dc.subjectx-rays
dc.subjectthin-film circuits
dc.subjectsemiconductor films
dc.subjectultra large scale integration
dc.subjectdesign and construction
dc.titleAdvanced X-ray Characterization of ULSI materials
dc.typeThesis
thesis.degree.departmentPhysics
thesis.degree.grantorSouthwest Texas State University
thesis.degree.levelMasters
thesis.degree.nameMaster of Science

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