The Formation of Silicon Nanoparticles on Silicon-on-insulator Substrate by Thermal Anneal

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dc.contributor.advisorSpencer, Gregory F.
dc.contributor.authorAnyamesem-Mensah, Benedicten_US
dc.contributor.committeeMemberGalloway, Heather C.
dc.contributor.committeeMemberGeerts, Wilhelmus J.
dc.date.accessioned2012-02-24T10:20:38Z
dc.date.available2012-02-24T10:20:38Z
dc.date.issued2007-05en_US
dc.description.abstractIn this study, we investigated the formation of silicon nanoparticles on a silicon-on-insulator (SOI) substrate that were created with a simple thermal treatment using temperatures ranging from 600oC to 900oC under atmospheric pressure in an inert gas (Ar). We studied the nanoparticle formation process versus the temperature of the thermal anneal, the thickness of the top silicon layer and we determined the variation of the particle size distribution with these parameters. The post-anneal substrate morphology is studied using ex situ atomic force microscopy (AFM). It was found that nanoparticle size increases with an increase in both the temperature and thickness of the top silicon layer. From a technological point of view, this study opens up a simpler way to synthesize silicon nanoparticles on an insulator.en_US
dc.description.departmentPhysics
dc.formatText
dc.format.extent95 pages
dc.format.medium1 file (.pdf)
dc.identifier.citationAnyamesem-Mensah, B. (2007). <i>The Formation of Silicon Nanoparticles on Silicon-on-insulator Substrate by Thermal Anneal</i> (Unpublished thesis). Texas State University, San Marcos, Texas.
dc.identifier.urihttps://hdl.handle.net/10877/4020
dc.language.isoen
dc.subjectSilicon formationen_US
dc.subjectNanoparticlesen_US
dc.subjectSoien_US
dc.subjectInsulatoren_US
dc.subjectThermal annealen_US
dc.titleThe Formation of Silicon Nanoparticles on Silicon-on-insulator Substrate by Thermal Annealen_US
dc.typeThesis
thesis.degree.departmentPhysics
thesis.degree.disciplinePhysics
thesis.degree.grantorTexas State University-San Marcos
thesis.degree.levelMasters
thesis.degree.nameMaster of Science

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