Ultraviolet Micro-Raman Stress Map of Polycrystalline Diamond Grown Selectivity on Silicon Substrates Using Chemical Vapor Deposition

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dc.contributor.authorAhmed, Raju
dc.contributor.authorNazari, Mohammad
dc.contributor.authorHancock, Bobby Logan
dc.contributor.authorSimpson, J.
dc.contributor.authorEngdahl, C.
dc.contributor.authorPiner, Edwin L.
dc.contributor.authorHoltz, Mark
dc.date.accessioned2019-04-11T19:54:48Z
dc.date.available2019-04-11T19:54:48Z
dc.date.issued2018-05-03
dc.description.abstractPolycrystalline diamond stripes, with a nominal thickness of ∼1.5 μm and various widths, were selectively grown on silicon substrates using chemical vapor deposition. Stress measurements using ultraviolet micro-Raman mapping reveal high compressive stress, up to ∼0.85 GPa, at the center of the diamond stripe, and moderate tensile stress, up to ∼0.14 GPa, in the substrate close to the interface with the diamond. Compressive stresses on diamond decrease with diminishing stripe widths. The stress map is well-described using finite element simulation incorporating solely thermal expansion effects.
dc.description.departmentPhysics
dc.formatText
dc.format.extent4 pages
dc.format.medium1 file (.pdf)
dc.identifier.citationAhmed, R., Nazari, M., Hancock, B. L., Simpson, J., Engdahl, C., Piner, E. L. & Holtz, M. W. (2018). Ultraviolet micro-Raman stress map of polycrystalline diamond grown selectivity on silicon substrates using chemical vapor deposition. Applied Physics Letters, 112(18), 181907.
dc.identifier.doihttps://doi.org/10.1063/1.5027507
dc.identifier.doihttps://doi.org/10.1063/1.5027507
dc.identifier.urihttps://hdl.handle.net/10877/7979
dc.language.isoen
dc.publisherAIP Publishing
dc.sourceApplied Physics Letters, 2018, Vol. 112, No. 21.
dc.subjectdiamond
dc.subjectultraviolet micro-raman stress map
dc.subjectchemical vapor
dc.subjectthermal effects
dc.subjectPhysics
dc.titleUltraviolet Micro-Raman Stress Map of Polycrystalline Diamond Grown Selectivity on Silicon Substrates Using Chemical Vapor Deposition
dc.typeArticle

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