Statistics for Reactive Plasma Etching of Silicon Carbide, Silicon Carbonitride, and Titanium Nitride in a Tetrafluoroethane/Oxygen Plasma
Total visits
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| Reactive Plasma Etching of Silicon Carbide, Silicon Carbonitride, and Titanium Nitride in a Tetrafluoroethane/Oxygen Plasma | 174 |
Total visits per month
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| November 2023 | 0 |
| December 2023 | 0 |
| January 2024 | 0 |
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| May 2024 | 0 |
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| McDonald_James_2006.pdf | 4 |
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