A Fast Fourier Transform Approach to Finding the Thickness of Single-Layer Thin Films with Slowly Varying Indices of Refraction and Negligible Absorption Coefficients

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dc.contributor.advisorChung, Matthias C.
dc.contributor.authorMiller, Geoffrey F.
dc.contributor.committeeMemberGeerts, Wilhelmus J.
dc.contributor.committeeMemberPassty, Gregory B.
dc.date.accessioned2012-07-17T19:28:47Z
dc.date.available2012-07-17T19:28:47Z
dc.date.issued2012-08en_US
dc.description.abstractA nonstandard photolithographic exposure tool motivates the search for a method to determine photoresist thickness in real time. Optical physics of two-interface thin film systems and the theory of Fourier series reveal a way to calculate photoresist thickness by applying an FFT (fast Fourier transform) algorithm to the reflectance spectrum of a light beam incident on the photoresist. Analyses of simulated data and preliminary measurements assess the speed and accuracy of the FFT algorithm and suggest further areas of research.
dc.description.departmentMathematics
dc.formatText
dc.format.extent69 pages
dc.format.medium1 file (.pdf)
dc.identifier.citationMiller, G. F. (2012). <i>A fast fourier transform approach to finding the thickness of single-layer thin films with slowly varying indices of refraction and negligible absorption coefficients</i> (Unpublished thesis). Texas State University-San Marcos, San Marcos, Texas.
dc.identifier.urihttps://hdl.handle.net/10877/4259
dc.language.isoen
dc.subjectPhotolithograpthy
dc.subjectPhotolithography on non-flat substrates
dc.subjectFourier
dc.subjectFast Fourier transform and Fourier series
dc.subject.lcshPhotoresistsen_US
dc.subject.lcshPhotolithographyen_US
dc.subject.lcshFourier transformationsen_US
dc.subject.lcshMathematical physicsen_US
dc.titleA Fast Fourier Transform Approach to Finding the Thickness of Single-Layer Thin Films with Slowly Varying Indices of Refraction and Negligible Absorption Coefficients
dc.typeThesis
thesis.degree.departmentMathematics
thesis.degree.disciplineMathematics
thesis.degree.grantorTexas State University-San Marcos
thesis.degree.levelMasters
thesis.degree.nameMaster of Science

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